Nanowire Gas Sensors Fabricated by Electron-Beam Lithography.
Wei-Cheng TianYu-Hsuan HoChaohao ChenChun-Yen KuoPublished in: Sensors (2013)
Keyphrases
- electron beam lithography
- electron beam
- circuit board
- data fusion
- x ray
- high speed
- sensor data
- genetic algorithm
- sensor networks
- multi sensor
- integrated circuit
- image acquisition
- sensor fusion
- design parameters
- real time
- image sensor
- sensor measurements
- particle swarm optimization
- three dimensional
- genetic search
- learning algorithm