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Humidity Sensor Based on Thin-Film Piezoelectric-on-Substrate Resonator and MoS2 for Multifunctional Applications.
Hanyong Dong
Jintao Pang
Dongsheng Li
Qian Zhang
Jin Xie
Published in:
NEMS (2021)
Keyphrases
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thin film
film thickness
high voltage
monitoring system
high density
short circuit
signal analysis
energy consumption
multi layer
white light interferometry
grain size
electron microscopy
room temperature
solar cell
sensor data
decision making
low power
learning tasks
artificial neural networks
genetic algorithm