Defect Probability of Directed Self-Assembly Lithography: Fast Identification and Post-Placement Optimization.
Seongbo ShimWoohyun ChungYoungsoo ShinPublished in: ICCAD (2015)
Keyphrases
- optimal placement
- optimization problems
- probability distribution
- optimization algorithm
- discrete optimization
- constrained optimization
- mathematical programming
- electron beam
- joint optimization
- optimal design
- multiple objectives
- optimization process
- data sets
- posterior probability
- expert systems
- search algorithm
- image processing