A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements.
Daniel KurzJürgen PilzAndrea SchirruSimone PampuriCristina De LucaPublished in: WSC (2014)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- decision making
- virtual reality
- production system
- augmented reality
- decision makers
- monte carlo
- random sampling
- virtual environment
- virtual world
- decision problems
- sample size
- decision model
- decision rules
- control system
- decision process
- sparsely sampled
- single view
- measurement noise
- sampling methods
- sampling rate
- sampling algorithm
- virtual laboratory
- camera calibration
- sampled data
- decision theory
- influence diagrams
- database
- image reconstruction
- active learning
- three dimensional
- case study
- information systems
- artificial intelligence
- real time