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Integrating the Fault Detection Method and Run-to-Run Control for Improving Semiconductor Process Control.
Chih-Hung Jen
Jia-Ming Wang
Published in:
ICCS (2011)
Keyphrases
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process control
detection method
control system
semiconductor manufacturing
detection algorithm
face detection
intelligent control
feature detection
product quality
control charts
real time
manufacturing process
control strategy
control method