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Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures.
George C. Giakos
A. Medithe
S. Sumrain
Srinivas Sukumar
Luay Fraiwan
A. Orozco
Published in:
IEEE Trans. Instrum. Meas. (2006)
Keyphrases
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semiconductor manufacturing
surface defects
machine vision
surface inspection
laser radar
high resolution
real time
image analysis
imaging systems
computer vision
image processing
sar imagery
photon counting
super resolution
printed circuit boards
process control
medical imaging