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Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation.

Yang ZhaoGuo Ming XiaQin ShiAn Ping Qiu
Published in: Sensors (2020)
Keyphrases
  • high speed
  • low cost
  • gallium arsenide
  • activity recognition
  • high density
  • trade off
  • human computer interaction
  • gesture recognition
  • transmission electron microscopy