Login / Signup

EDA solutions to new-defect detection in advanced process technologies.

Erik Jan MarinissenGilbert VandlingSandeep Kumar GoelFriedrich HapkeJason RiversNikolaus MittermaierSwapnil Bahl
Published in: DATE (2012)
Keyphrases
  • defect detection
  • real world
  • real time
  • computer vision
  • artificial intelligence
  • information technology
  • process model
  • benchmark problems