Simulation and experiment of inverted pyramid DBD micro-plasma devices array for maskless nanoscale etching.

Yichuan Dai Li Wen Jie Liu Hai Wang

Published in: NEMS (2016)

Keyphrases

thin film
plasma etching
electro mechanical systems
multiresolution
mobile devices
information systems
scale space
mathematical model
simulation study
image processing
multiscale
multi agent
embedded systems
simulation environment
simulation models
atomic force microscopy