Simulation and experiment of inverted pyramid DBD micro-plasma devices array for maskless nanoscale etching.

Yichuan Dai Li Wen Jie Liu Hai Wang

Published in: NEMS (2016)

Keyphrases

thin film
plasma etching
electro mechanical systems
multiresolution

mobile devices
information systems
scale space
mathematical model

simulation study
image processing
multiscale
multi agent

embedded systems
simulation environment
simulation models
atomic force microscopy