Automated high-speed nanopositioning inside scanning electron microscopes.
Daniel JasperSergej FatikowPublished in: CASE (2010)
Keyphrases
- high speed
- low power
- high speed networks
- semi automated
- semi automatic
- artificial intelligence
- information systems
- image processing
- image analysis
- computer assisted
- frame rate
- fully automated
- scan data
- electron microscope
- metal oxide
- automated analysis
- data sets
- van der waals
- data driven
- evolutionary algorithm
- social networks
- genetic algorithm
- machine learning
- neural network