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Modeling and optimization of the fabrication process of thin-film solar cells by multi-source physical vapor deposition.

Athmane BakhtaJulien Vidal
Published in: Math. Comput. Simul. (2021)
Keyphrases
  • thin film
  • multi source
  • high density
  • plasma etching
  • short circuit
  • multiple sources
  • chemical vapor deposition
  • data fusion
  • data sets
  • information fusion
  • multi layer