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Modeling and optimization of the fabrication process of thin-film solar cells by multi-source physical vapor deposition.
Athmane Bakhta
Julien Vidal
Published in:
Math. Comput. Simul. (2021)
Keyphrases
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thin film
multi source
high density
plasma etching
short circuit
multiple sources
chemical vapor deposition
data fusion
data sets
information fusion
multi layer