Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser.
Yuki AdachiYifan XiongHanqiao YeRubing ZuoMasaya MoritaKenta KaichiRyosei KinoshitaMasato MorifujiAkihiro MarutaHirotake KajiiMasahiko KondowPublished in: IEICE Electron. Express (2023)