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Fabrication and characterization of silicon-based microsensors for detecting offensive gases.
Kyu-Chung Lee
Chang-Wu Hur
Published in:
J. Inform. and Commun. Convergence Engineering (2008)
Keyphrases
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high density
high speed
semiconductor devices
plasma etching
databases
low cost
data center
low density
case study
three dimensional
magnetic recording
silicon dioxide
real world
genetic algorithm
integrated circuit