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Analysis of 28 nm SRAM cell stability under mechanical load applied by nanoindentation.

André ClausnerSimon SchlipfGottfried KurzMichael OttoJens PaulKay-Uwe GieringJens WarmuthAndré LangeRoland JanckeAndreas AalRüdiger RosenkranzMartin GallEhrenfried Zschech
Published in: IRPS (2018)
Keyphrases
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