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Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs.

Shinzo TsuboiGenshiro KawachiMasahiro MitaniTakashi Okada
Published in: Inf. Media Technol. (2008)
Keyphrases
  • thin film
  • solar cell
  • metal oxide
  • high efficiency
  • plasma etching
  • case study
  • high density
  • solid state
  • information systems
  • scientific computing
  • positive effects
  • low voltage
  • field effect transistors