Room temperature ozone and humidity response evolution of atomic layer deposited SnO2 sensors.
Steven MillsBongmook LeeVeena MisraPublished in: IEEE SENSORS (2017)
Keyphrases
- room temperature
- film thickness
- thin film
- monitoring system
- data acquisition
- magnetic field
- health monitoring
- multi layer
- sensor data
- sensor networks
- real time
- data fusion
- electron microscopy
- sensor fusion
- application layer
- sensor technology
- chemical vapor deposition
- silicon nitride
- thermal conductivity
- solar radiation
- air pollution
- multiple layers
- multi sensor
- low cost
- data sets