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Punch-Through-Stopper Free Nanosheet FETs With Crescent Inner-Spacer and Isolated Source/Drain.

Jun-Sik YoonJinsu JeongSeunghwan LeeRock-Hyun Baek
Published in: IEEE Access (2019)
Keyphrases
  • early warning
  • information retrieval
  • e learning
  • wide range
  • cooperative
  • probabilistic model
  • management system
  • multiple sources