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Plasma Temperature and Electron Density of Dry µ-EDM on Stainless Steel and Silicon: A Comparison.

Kanmani Subbu SubbianRamkumar JanakarajanDhamodaran Santhanagopalan
Published in: Int. J. Autom. Technol. (2011)
Keyphrases
  • chemical vapor deposition
  • high density
  • stainless steel
  • plasma etching
  • thin film
  • flow patterns
  • evolutionary algorithm