Optical metrology aimed for process quality-control-loops (QCL) in production-modules for micro-technology.

Ubaldo Aleriano Sanchez Tilo Pfeifer

Published in: SMC (6) (2004)

Keyphrases

quality control
manufacturing process
product quality
process control
machine vision
manufacturing processes
quality assurance
manufacturing systems
process model
case study
data processing
neural network
multi agent
personal computer
production rate
development process
control system
computer vision