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Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors.

Lin ShuBin PengYilin CuiDongdong GongZhengbing YangXingzhao LiuWanli Zhang
Published in: Sensors (2016)
Keyphrases
  • high temperature
  • silicon dioxide
  • real time
  • sensor data
  • social networks
  • sensor networks
  • control system
  • data fusion
  • multi layer
  • quality control
  • sensor fusion
  • sensor technology