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Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, and DFM Characterization at 65 nm and Below.
Greg Yeric
Ethan Cohen
John Garcia
Kurt Davis
Esam Salem
Gary Green
Published in:
IEEE Des. Test Comput. (2005)
Keyphrases
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manufacturing processes
production planning
quality control
data sets
website
case study
building blocks
manufacturing systems
knowledge transfer
manufacturing process
information infrastructure
support environment