Application of Scanning Capacitance Microscopy on SOI device with wafer edge low yield pattern.
Changqing ChenGhim Boon AngPeng Tiong NgFrancis RivaiSoh Ping NeoDayanand NagalingamKim Hong YipJeffery LamZhihong MaiPublished in: Microelectron. Reliab. (2017)