A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter.
Karim AllidinaMohammad Ali TaghvaeiFrederic NabkiPaul-Vahe CicekMourad N. El-GamalPublished in: ICECS (2009)
Keyphrases
- high voltage
- low voltage
- analog to digital converter
- single phase
- sensor networks
- sensor data
- pulse width modulation
- output voltage
- power system
- control method
- design considerations
- power supply
- ultra high
- transmission line
- transfer function
- real time
- operating conditions
- multi sensor
- power losses
- electric field
- wind turbine
- sensor fusion
- image sensor
- duty cycle