Room Temperature Cu-Cu Direct Bonding Using Wetting/Passivation Scheme for 3D Integration and Packaging.
Zhong-Jie HongDemin LiuShu-Ting HsiehHan-Wen HuMing-Wei WengChih-I ChoJui-Han LiuKuan-Neng ChenPublished in: VLSI Technology and Circuits (2022)