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Optical absorption spectroscopy with 1310 nm wavelength wafer-fused vertical-cavity surface-emitting lasers.
Svatopluk Civis
Zdenek Zelinger
Martin Ferus
Vladimir Iakovlev
Alexei Sirbu
Eli Kapon
Published in:
ICTON (2014)
Keyphrases
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optical properties
infrared
linear relationship
x ray
wide field of view
closely spaced
light scattering
semiconductor manufacturing
refractive index
multispectral images
integrated circuit
data fusion
field of view
metal oxide
surface reconstruction
electron microscopy
laser beam
white light