Login / Signup
Cavity formation in bonded silicon wafers using partially cured dry etch bisbenzocyclobutene (BCB).
Aref Bakhtazad
Rayyan Manwar
Sazzadur Chowdhury
Published in:
LASCAS (2014)
Keyphrases
</>
integrated circuit
high speed
manufacturing process
electron beam
semiconductor manufacturing
data sets
data mining
low cost
high density
magnetic recording
real time
neural network
social networks
artificial neural networks