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Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation.
Hongbo Wang
Wei Li
Zhihua Feng
Published in:
IEEE Trans. Instrum. Meas. (2015)
Keyphrases
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eddy current
grain size
spatial distribution
magnetic field
data acquisition
thin film
sensor networks
euclidean distance
distance function
sensor data
data fusion
anomaly detection
distance measure
distance measurement
chemical vapor deposition
real time
metal oxide
immune response
mobile robot