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Fabrication of graphene based electrothermal cantilever actuator.
Yilong Zhou
Hengchang Bi
Xiao Xie
Litao Sun
Published in:
NEMS (2013)
Keyphrases
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high density
integrated circuit
control system
closed loop
control method
electron beam
working principle
semiconductor devices
high speed
thin film transistor
database
databases
video sequences
magnetic recording
electrical properties