Convolutional Neural Network for Semiconductor Wafer Defect Detection.
B. DevikaNeetha GeorgePublished in: ICCCNT (2019)
Keyphrases
- defect detection
- convolutional neural network
- semiconductor manufacturing
- wafer fabrication
- face detection
- process control
- production system
- feature extraction
- neural network
- detection method
- machine learning
- automated visual inspection
- artificial intelligence
- databases
- markov chain
- object detection
- support vector machine
- information technology
- feature selection