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Arrayed-waveguide-grating based on proton exchange and etching combined fabrication over bulk Lithium-Niobate substrate.
Jiaxi Yuan
Jiangbing Du
Jiacheng Liu
Zuyuan He
Published in:
MMSP (2022)
Keyphrases
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magnetic recording
integrated circuit
waveguide
high density
computer simulation
neural fuzzy
semiconductor devices
plasma etching
dielectric constant
data sets
fuzzy logic
high speed
monte carlo
electron beam