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E-BLOW: E-Beam Lithography Overlapping aware Stencil Planning for MCC System.
Bei Yu
Kun Yuan
Jhih-Rong Gao
David Z. Pan
Published in:
CoRR (2014)
Keyphrases
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electron beam
electron beam lithography
heuristic search
ai planning
domain independent
image processing
x ray
strategic planning
planning systems
goal oriented
real time
decision making
information systems
social networks
information retrieval
data mining
neural network
databases