Nano-scale tip fabricated by electro-chemical machining for nano lithography.

Yuan-Jen Chang Han-Kuan Huang

Published in: NEMS (2014)

Keyphrases

nano scale
electron beam
high speed
x ray
integrated circuit
design parameters
position and orientation
drug discovery
electron beam lithography
real time
vision system
low power
process planning
chemical engineering
machining processes
chemical compounds
image acquisition
case study
neural network