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Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage.
Weicai Huang
Kaiming Yang
Yu Zhu
Xin Li
Haihua Mu
Min Li
Published in:
J. Syst. Control. Eng. (2020)
Keyphrases
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feed forward
data driven
neural network
recurrent neural networks
back propagation
artificial neural networks
integrated circuit
visual cortex
adaptive neural
image sequences
neural nets
artificial neural