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Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems.
Anna Persano
Fabio Quaranta
Antonietta M. Taurino
Pietro Siciliano
Jacopo Iannacci
Published in:
Sensors (2020)
Keyphrases
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thin film
telecommunication systems
real time
high density
cyber security
information integration
solar cell
short circuit
multi layer
plasma etching
room temperature
white light interferometry
film thickness
chemical vapor deposition
data collection
data analysis
database systems