Sputter-Etching of Heterogeneous Surfaces.

Leon I. Maissel Charles L. Standley Lawrence V. Gregor

Published in: IBM J. Res. Dev. (1972)

Keyphrases

thin film
three dimensional
free form
integrated circuit
data sets
surface reconstruction
surface model
smooth surfaces
surface fitting
information systems
heterogeneous data
surface representation
digital topology
simply connected