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Integrated Temperature and Hydrogen Sensors with MEMS Technology.
Hongchuan Jiang
Min Huang
Yibing Yu
Xiaoyu Tian
Xiaohui Zhao
Wanli Zhang
Jianfeng Zhang
Yifan Huang
Kun Yu
Published in:
Sensors (2018)
Keyphrases
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sensor technology
sensor networks
data processing
sensor fusion
multi sensor
real time
case study
sensor data
chemical vapor deposition
database
technological advances
key technologies
rapid development
personal computer
low power
cost effective
steady state
information systems