Low pull-in voltage electrostatic MEMS switch using liquid dielectric.

Mohammed Affan Zidan Jürgen Kosel Khaled N. Salama

Published in: MWSCAS (2014)

Keyphrases

electric field
transmission line
electrical properties
high speed
silicon dioxide
power system
metal oxide
high levels
neural network
search engine
mathematical model
boundary conditions
power supply
high voltage
dielectric constant