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Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors.
Lars Thormählen
Dennis Seidler
Viktor Schell
Frans Munnik
Jeffrey McCord
Dirk Meyners
Published in:
Sensors (2021)
Keyphrases
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magnetic field
rf sputtering
electromagnetic fields
eddy current
working principle
sensor networks
data fusion
sensor data
multi layer
real time
multi sensor
phase transition
permanent magnet
multiscale
electron microscopy
electron beam
np complete