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Solid phase crystallization of amorphous silicon on glass by thin film heater for thin film transistor (TFT) application.
Byoung Dong Kim
Hunjoon Jung
Gi-Bum Kim
Seung-Ki Joo
Published in:
Microelectron. J. (2003)
Keyphrases
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thin film
thin film transistor
liquid crystal displays
solar cell
high density
plasma etching
tft lcd
chemical vapor deposition
short circuit
three dimensional
room temperature
image sequences
high resolution
decision makers
film thickness