LPCVD-silicon oxynitride films: interface properties.

E. Halova Sashka Alexandrova A. Szekeres Mircea Modreanu

Published in: Microelectron. Reliab. (2005)

Keyphrases

neural network
silicon dioxide
high speed
high density
database
low cost
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desirable properties
data sets
information systems
expert systems
data model
chemical vapor deposition