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Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD.

Qunchao GuoXinhua Geng
Published in: ICSAI (2019)
Keyphrases
  • chemical vapor deposition
  • thin film
  • high quality
  • high density
  • plasma etching
  • solar cell
  • databases
  • multi layer
  • low density
  • short circuit
  • learning algorithm
  • radio frequency