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Effect of lanthanum silicate interface layer on the electrical characteristics of 4H-SiC metal-oxide-semiconductor capacitors.

Yiming LeiHitoshi WakabayashiKazuo TsutsuiHiroshi IwaiMasayuki FuruhashiShingo TomohisaSatoshi YamakawaKuniyuki Kakushima
Published in: Microelectron. Reliab. (2018)
Keyphrases
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