On-chip fabrication and assembly of rotational microstructures.

Masaki Ito Masahiro Nakajima Hisataka Maruyama Toshio Fukuda

Published in: IROS (2009)

Keyphrases

high density
high speed
printed circuit boards
integrated circuit
thin film
analog vlsi
programmable logic
low cost
degrees of freedom
high bandwidth
silicon on insulator
chip design
field effect transistors
single chip
process planning
vlsi design
vlsi implementation
low power
assembly process
data center