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Thin Films for Capacitive RF MEMS Switches.
Anna Persano
Fabio Quaranta
Adriano Cola
Antonietta M. Taurino
Giorgio De Angelis
Romolo Marcelli
Pietro Siciliano
Published in:
J. Sensors (2010)
Keyphrases
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thin film
radio frequency
relevance feedback
high density
short circuit
multi layer
grain size
solar cell
plasma etching
genetic algorithm
database systems
data streams
viewpoint
image data
low density
room temperature