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Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in Optical Lithography Machines: Preliminary Results.
Yazan Mohammad Al-Rawashdeh
Mahmoud Al-Tamimi
Marcel Heertjes
Mohammad Al Janaideh
Published in:
ACC (2021)
Keyphrases
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motion control
mobile robot
electron beam
control system
autonomous navigation
robot control
physical constraints
autonomous robots
high resolution
control algorithm
machine learning
visual servoing
dynamic environments
neural network
multi objective
three dimensional
robotic soccer