An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors.

B. Meng W. Tang Z. R. Wang H. X. Zhang

Published in: NEMS (2012)

Keyphrases

high speed
silicon on insulator
high density
low cost
sensor networks
wide range
real time
focal plane
sensor data
data acquisition
semiconductor devices
data sets
cmos technology
image sensor
gate dielectrics
vlsi circuits
sensor fusion
integrated circuit
low power
power consumption
data fusion
high resolution