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B. Meng
Publication Activity (10 Years)
Years Active: 2012-2012
Publications (10 Years): 0
Top Topics
Sensor Fusion
Gate Dielectrics
High Density
Semiconductor Devices
Top Venues
NEMS
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Publications
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B. Meng
,
W. Tang
,
Z. R. Wang
,
H. X. Zhang
An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors.
NEMS
(2012)