Fabrication of JFET device on Si (111) for sensor interface array circuit.
Yoshiko KatoTakashi HashimotoLiew Yoke ChingHidekuni TakaoKazuaki SawadaMakoto IshidaPublished in: IEICE Electron. Express (2004)
Keyphrases
- semiconductor devices
- high speed
- electron beam
- sensor data
- sensor networks
- silicon on insulator
- focal plane
- sensor array
- user interface
- data acquisition
- integrated circuit
- field effect transistors
- real time
- interface design
- image sensor
- direct manipulation
- metal oxide semiconductor
- charge coupled device
- user friendly
- neural network
- programmable logic
- high density
- cmos technology
- electronic circuits
- input device
- sensing devices
- circuit design
- sensor fusion
- steady state