Login / Signup
Explainable AutoML (xAutoML) with adaptive modeling for yield enhancement in semiconductor smart manufacturing.
Weihong Zhai
Xiupeng Shi
Yiik Diew Wong
Qing Han
Lisheng Chen
Published in:
CoRR (2024)
Keyphrases
</>
semiconductor manufacturing
image enhancement
image processing
information systems
data driven
database
image sequences
manufacturing systems
quality control
manufacturing process
wafer fabrication