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Layout decomposition co-optimization for hybrid e-beam and multiple patterning lithography.

Yunfeng YangWai-Shing LukHai ZhouChanghao YanXuan ZengDian Zhou
Published in: ASP-DAC (2015)
Keyphrases
  • electron beam
  • integrated circuit
  • data mining
  • optimization method
  • optimization algorithm
  • global optimization
  • optimization methods
  • multiple objects
  • constrained optimization
  • evolution strategy
  • decomposition method